Applied SmartFactory® Fault Detection and Classification

SmartFactory FDC detects equipment issues immediately by continuously monitoring sensors and events against performance metrics, resulting in improved tool availability and reduced scrap. In one case, a customer improved tool utilization by 6 hours per week. In another case, FDC results were used to isolate a tool fault that resulted in avoided PM downtime.

SmartFactory FDC continuously monitors equipment parameters against preconfigured limits using statistical analysis techniques to provide proactive and rapid feedback on equipment health. It eliminates unscheduled downtime, improves tool availability and reduces scrap. FDC is proven to detect equipment issues faster than similar systems and is the only solution built on a single platform that works with multiple EES and APC systems. Applied Material’s FDC software is used by leading memory and logic 300mm semiconductor factories, as well as LCD display manufacturers.

SmartFactory FDC provides a deeper understanding of equipment data. It performs the data analysis portion of the solution by taking collected data and completing the analysis so you can act upon the data. SmartFactory FDC makes your engineering team more effective by allowing engineers to analyze sensor data from manufacturing equipment, detect out‐of‐ norm conditions and trace them back to the tool issues. Its flexible model management capabilities make building and managing models fast and easy, reducing development effort by multiple man months.