| Aera™ 4 Mask Inspection | Metrology and Inspection, Photomask | Patterning | Aera™ |
| ALTA® 4700DP Mask Writer | Photomask | Patterning | |
| Applied® Sigmameltec™ CTS Mask Coat Series | Photomask | Patterning | |
| Applied® Sigmameltec™ MRC Mask Clean Series | Photomask | Patterning | |
| Applied® Sigmameltec™ SFB Mask Bake Series | Photomask | Patterning | |
| Applied® Sigmameltec™ SFD Mask Develop Series | Photomask | Patterning | |
| Centura® Tetra™ EUV Advanced Reticle Etch | Etch, Photomask | Patterning | Centura® |
| Centura® Tetra™ Z Photomask Etch | Etch, Photomask | Patterning | Centura® |
