Enflexor® TFE System
Plasma enhanced chemical vapor deposition – thin film encapsulation (PECVD-TFE) system the Enflexor® Gen 6H PECVD deposits superior barrier films to enable flexible organic light-emitting diode (OLED) panel technology. The Enflexor Gen6H has mask deposition technology with auto mask exchange function for productive enhancement. The Enflexor Gen6H can provide a range of buffer films for all-in-one system process capability. Yield performance provides a quick path to mass production. The system easily integrates to other OLED tools.