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等离子体增强化学气相镀膜(PECVD-TFE)设备Enflexor™ Gen 6H PECVD可沉积卓越的阻隔膜层,实现柔性OLED面板技术。Enflexor Gen6H提供一系列的缓冲膜层及网格技术。具备用于全方位一体化系统处理能力的网格自动交换。而良率性能管理则是通往量产的捷径。该设备易与其他OLED设备整合。